Lecture 10

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  Lecture 10 Surface Micromachining -1  Surface Micromachining ! Basic process sequence (poly-Si) –Fabricating a poly-Si anchor »Passivationlayer »PSG-phosphosilicateglass»Structural material (poly-Si)-dry etching for patterning»Spacer etching or release  –Generic principle of surface micromachining –LPCVD of poly-Si ! Stiction ! Sacrificial layer  ! Sealing processes  Surface Micromachining  Principal steps inpolysiliconsurface micromachining   Surface Micromachining
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